Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France /

Bibliographic Details
Corporate Authors:	European Physical Society, European Federation for Applied Optics, Society of Photo-optical Instrumentation Engineers, Association nationale de la recherche technique, ECO2
Other Authors:	Lacombat, Michel J., Wittekoek, Steven
Format:	Conference Proceeding Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1989]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1138.
Subjects:	Integrated circuits > Design and construction > Congresses. Microlithography > Congresses.

Description
Item Description:	At head of title: Proceedings / ECO. "ECO2."
Physical Description:	vii, 206 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographies and index.
ISBN:	0819401749 (pbk.) :