Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France /

Bibliographic Details
Corporate Authors:	European Physical Society, European Federation for Applied Optics, Society of Photo-optical Instrumentation Engineers, Association nationale de la recherche technique, ECO2
Other Authors:	Lacombat, Michel J., Wittekoek, Steven
Format:	Conference Proceeding Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1989]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1138.
Subjects:	Integrated circuits > Design and construction > Congresses. Microlithography > Congresses.

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