Vacuum mechatronics : first international workshop, Santa Barbara, CA, 1989 /
| Corporate Authors: | , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York :
American Institute of Physics,
[1989]
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| Series: | American Vacuum Society series ;
7. AIP conference proceedings ; no. 192. |
| Subjects: |
| Item Description: | Papers presented at the First International Vacuum Mechatronics Workshop, held Feb. 2-3, 1989 at the University of California, Santa Barbara. |
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| Physical Description: | x, 167 pages : illustrations ; 25 cm. |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 0883183943 |