Vacuum mechatronics : first international workshop, Santa Barbara, CA, 1989 /

Bibliographic Details
Corporate Authors:	International Vacuum Mechatronics Workshop, American Vacuum Society
Other Authors:	Belinski, Steven E.
Format:	Conference Proceeding Book
Language:	English
Published:	New York : American Institute of Physics, [1989]
Series:	American Vacuum Society series ; 7. AIP conference proceedings ; no. 192.
Subjects:	Vacuum technology > Congresses.

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