Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California /

Integrated circuit metrology, inspection, and process control : 4-6 March 1987, Santa Clara, California /
Published: (1987)

Integrated circuit metrology, inspection, and process control II : 29 February-1 March 1988, Santa Clara, California /
Published: (1988)

Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California /
Published: (1995)

Metrology, inspection, and process control for microlithography XI : 10-12 March 1997, Santa Clara, California /
Published: (1997)

Metrology, inspection, and process control for microlithography XIX : 28 February-3 March 2005, San Jose, California, USA /
Published: (2005)

Metrology, inspection, and process control for microlithography XXI : 26 February-1 March 2007, San Jose, California, USA /
Published: (2007)

Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California /
Published: (1989)

Metrology, inspection, and process control for microlithography XX : 20-23 February 2006, San Jose, California, USA /
Published: (2006)

Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California /
Published: (1985)

Integrated circuit metrology : May 4-5, 1982, Arlington, Virginia /
Published: (1982)

Metrology, inspection, and process control for microlithography XIII : 15-18 March 1999, Santa Clara, California /
Published: (1999)

Metrology, inspection, and process control for microlithography XIV : 28 February-2 March 2000, Santa Clara, California /
Published: (2000)

Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, Santa Clara, California /
Published: (1998)

Metrology, inspection, and process control for microlithography XVII : 24-27 February 2003, Santa Clara, California, USA /
Published: (2003)

Metrology, inspection, and process control for microlithography XVIII : 23-26 February 2004, Santa Clara, California, USA /
Published: (2004)

Metrology, inspection, and process control for microlithography XVI : 26 4-7 March 2002, Santa Clara, USA /
Published: (2002)

Metrology, inspection, and process control for microlithography XV : 26 February-1 March 2001, Santa Clara, USA /
Published: (2001)

Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia /
Published: (1984)

Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California /
Published: (1991)

Advanced techniques for integrated circuit processing II : 21-23 September 1992, San Jose, California /
Published: (1993)

Process, equipment, and materials control in integrated circuit manufacturing IV : 22-24 September 1998, Santa Clara, California /
Published: (1998)

Characterization and metrology for ULSI technology : 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 /
Published: (2003)

Proceedings of the IEEE 2003 Custom Integrated Circuits Conference : DoubleTree Hotel, September 21-24, 2003, San Jose, California /
Published: (2003)

Functional photonic integrated circuits : 9-10 February 1995, San Jose, California /
Published: (1995)

Characterization and metrology for ULSI technology : Richardson, Texas, 15-18 March 2005 /
Published: (2005)

Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland, March 1998 /
Published: (1998)

Design and process integration for microelectronic manufacturing IV : 23-24 February 2006, San Jose, California, USA /
Published: (2006)

Frontiers of characterization and metrology for nanoelectronics : 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Albany, New York, 11-15 May 2009 /
Published: (2009)

Proceedings of the IEEE 2001 Custom Integrated Circuits Conference : Town and Country Hotel, May 6-9, 2001, San Diego, California /
Published: (2001)

Proceedings of the IEEE 1996 Custom Integrated Circuits Conference : Town and Country Hotel, San Diego, California, May 5-8, 1996 /
Published: (1996)

Developments in integrated circuit testing /
Published: (1987)

Frontiers of characterization and metrology for nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Gaithersburg, Maryland, 27-29 March 2007 /
Published: (2007)

Integrated circuit engineering : establishing a foundation /
by: Herbst, L. J.
Published: (1996)

Proceedings of the IEEE 1999 Custom Integrated Circuits Conference : Town and Country Hotel, May 16-19, 1999, San Diego, California /
Published: (1999)

Proceedings of the IEEE 1993 Custom Integrated Circuits Conference : Town & Country Hotel, San Diego, California, May 9-12, 1993 /
Published: (1993)

Proceedings of the IEEE 1994 Custom Integrated Circuits Conference : Town & Country Hotel, San Diego, California, May 1-4, 1994 /
Published: (1994)