Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Arnold, William H.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1990]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1261.
Subjects:	Integrated circuits > Congresses. Measurement > Congresses.

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