Society of Photo-optical Instrumentation Engineers & Arnold, W. H. (1990). Integrated circuit metrology, inspection, and process control IV: 5-6 March 1990, San Jose, California. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers and William H. Arnold. Integrated Circuit Metrology, Inspection, and Process Control IV: 5-6 March 1990, San Jose, California. Bellingham, Wash., USA: SPIE, 1990.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers and William H. Arnold. Integrated Circuit Metrology, Inspection, and Process Control IV: 5-6 March 1990, San Jose, California. SPIE, 1990.
Warning: These citations may not always be 100% accurate.