Optical/laser microlithography II : 1-3 March 1989, San Jose, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Lin, Burn Jeng, 1942-
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1989]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1088.
Subjects:	Laser printing. Lasers > Industrial applications > Congresses. Optical instruments > Congresses. Microlithography > Congresses.

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