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Plasma-surface interactions and processing of materials /

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Bibliographic Details
Corporate Author: NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials Alicante, Spain
Other Authors: Auciello, Orlando, 1945-
Format: Conference Proceeding Book
Language:English
Published: Dordrecht ; Boston : Kluwer Academic Publishers, [1990]
Series:NATO ASI series. Applied sciences ; no. 176.
Subjects:
Surfaces (Technology) > Congresses.
Materials > Effect of radiation on > Congresses.
Microelectronics > Materials > Effect of radiation on > Congresses.
Plasma etching > Congresses.
Description
Item Description:Proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4- 16, 1988.
"Published in cooperation with NATO Scientific Affairs Division."
Physical Description:xiii, 557 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0792305841 (alk. paper)