Plasma-surface interactions and processing of materials /

Bibliographic Details
Corporate Author:	NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials Alicante, Spain
Other Authors:	Auciello, Orlando, 1945-
Format:	Conference Proceeding Book
Language:	English
Published:	Dordrecht ; Boston : Kluwer Academic Publishers, [1990]
Series:	NATO ASI series. Applied sciences ; no. 176.
Subjects:	Surfaces (Technology) > Congresses. Materials > Effect of radiation on > Congresses. Microelectronics > Materials > Effect of radiation on > Congresses. Plasma etching > Congresses.

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