Cover Image

Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Monahan, Kevin M.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, 1989.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1087.
Subjects:
Integrated circuits > Inspection > Congresses.
Integrated circuits > Measurement > Congresses.
Description
Physical Description:x, 535 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819401226