Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Monahan, Kevin M.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, 1989.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1087.
Subjects:	Integrated circuits > Inspection > Congresses. Integrated circuits > Measurement > Congresses.

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