Society of Photo-optical Instrumentation Engineers & Monahan, K. M. (1989). Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers and Kevin M. Monahan. Integrated Circuit Metrology, Inspection, and Process Control III, 27-28 February 1989, Los Angeles, California. Bellingham, Wash., USA: SPIE, 1989.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers and Kevin M. Monahan. Integrated Circuit Metrology, Inspection, and Process Control III, 27-28 February 1989, Los Angeles, California. SPIE, 1989.
Warning: These citations may not always be 100% accurate.