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Monitoring and control of plasma-enhanced processing of semiconductors : proceedings : 1-2 November 1988, Santa Clara, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Griffiths, James E.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1989]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1037.
Subjects:
Semiconductors > Congresses.
Plasma engineering > Congresses.
Epitaxy > Congresses.
Vapor-plating > Congresses.
Description
Physical Description:viii, 147 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819400726