Monitoring and control of plasma-enhanced processing of semiconductors : proceedings : 1-2 November 1988, Santa Clara, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Griffiths, James E.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1989]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1037.
Subjects:	Semiconductors > Congresses. Plasma engineering > Congresses. Epitaxy > Congresses. Vapor-plating > Congresses.

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