Society of Photo-optical Instrumentation Engineers & Griffiths, J. E. (1989). Monitoring and control of plasma-enhanced processing of semiconductors: Proceedings : 1-2 November 1988, Santa Clara, California. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers and James E. Griffiths. Monitoring and Control of Plasma-enhanced Processing of Semiconductors: Proceedings : 1-2 November 1988, Santa Clara, California. Bellingham, Wash., USA: SPIE, 1989.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers and James E. Griffiths. Monitoring and Control of Plasma-enhanced Processing of Semiconductors: Proceedings : 1-2 November 1988, Santa Clara, California. SPIE, 1989.
Warning: These citations may not always be 100% accurate.