Cover Image

Microelectronic materials and processes : [proceedings of the NATO Advanced Study Institute on Microelectronic Materials and Processes, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986] /

Bibliographic Details
Corporate Authors: NATO Advanced Study Institute on Microelectronic Materials and Processes Il Ciocco, Italy, North Atlantic Treaty Organization
Other Authors: Levy, Roland A. (Roland Albert), 1944-
Format: Conference Proceeding Book
Language:English
Published: Dordrecht ; Boston : Kluwer Academic, [1989]
Series:NATO ASI series. Applied sciences ; no. 164.
Subjects:
Microelectronics > Materials > Congresses.
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Description
Physical Description:xiv, 985 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographies and index.
ISBN:0792301471
0792301544 (pbk.)