Microelectronic materials and processes : [proceedings of the NATO Advanced Study Institute on Microelectronic Materials and Processes, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986] /

Bibliographic Details
Corporate Authors:	NATO Advanced Study Institute on Microelectronic Materials and Processes Il Ciocco, Italy, North Atlantic Treaty Organization
Other Authors:	Levy, Roland A. (Roland Albert), 1944-
Format:	Conference Proceeding Book
Language:	English
Published:	Dordrecht ; Boston : Kluwer Academic, [1989]
Series:	NATO ASI series. Applied sciences ; no. 164.
Subjects:	Microelectronics > Materials > Congresses. Integrated circuits > Very large scale integration > Design and construction > Congresses.

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