Glow-discharge hydrogenated amorphous silicon /

Bibliographic Details

Other Authors:	Tanaka, K. (Kazunobu), 1940-
Format:	Book
Language:	English
Published:	Tokyo : Dordrecht ; Boston : KTK Scientific Publishers ; Kluwer Academic Publishers, [1989]
Series:	Advances in solid state technology.
Subjects:	Amorphous semiconductors. Silicon. Doped semiconductors. Surface chemistry. Glow discharges.