Cover Image

Polymers in microlithography : materials and processes /

Bibliographic Details
Corporate Author: American Chemical Society. Division of Polymeric Materials: Science and Engineering
Other Authors: Reichmanis, Elsa, 1953-, MacDonald, Scott A., Iwayanagi, Takao, 1949-
Format: Book
Language:English
Published: Washington, DC : American Chemical Society, 1989.
Series:ACS symposium series. 412.
Subjects:
Polymers > Congresses.
Photoresists > Congresses.
Microlithography > Materials > Congresses.
Description
Item Description:"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
Physical Description:xii, 449 pages : illustrations
Bibliography:Includes bibliographical references.
ISBN:0841217017 (alk. paper)
ISSN:0097-6156 ;