Polymers in microlithography : materials and processes /

Bibliographic Details
Corporate Author:	American Chemical Society. Division of Polymeric Materials: Science and Engineering
Other Authors:	Reichmanis, Elsa, 1953-, MacDonald, Scott A., Iwayanagi, Takao, 1949-
Format:	Book
Language:	English
Published:	Washington, DC : American Chemical Society, 1989.
Series:	ACS symposium series. 412.
Subjects:	Polymers > Congresses. Photoresists > Congresses. Microlithography > Materials > Congresses.

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