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Microelectronics processing : chemical engineering aspects /

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Bibliographic Details
Other Authors: Hess, Dennis W., Jensen, Klavs F., 1952-
Format: Book
Language:English
Published: Washington, DC : American Chemical Society, 1989.
Series:Advances in chemistry series. 221.
Subjects:
Microelectronics > Materials.
Integrated circuits > Design and construction.
Surface chemistry.
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Published 1989
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