Microelectronics processing : chemical engineering aspects /

Bibliographic Details
Other Authors:	Hess, Dennis W., Jensen, Klavs F., 1952-
Format:	Book
Language:	English
Published:	Washington, DC : American Chemical Society, 1989.
Series:	Advances in chemistry series. 221.
Subjects:	Microelectronics > Materials. Integrated circuits > Design and construction. Surface chemistry.

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