Microelectronics processing : chemical engineering aspects /

Bibliographic Details
Other Authors:	Hess, Dennis W., Jensen, Klavs F., 1952-
Format:	Book
Language:	English
Published:	Washington, DC : American Chemical Society, 1989.
Series:	Advances in chemistry series. 221.
Subjects:	Microelectronics > Materials. Integrated circuits > Design and construction. Surface chemistry.

Description
Physical Description:	xiv, 547 pages : illustrations
Bibliography:	Includes bibliographical references and index.
ISBN:	0841214751
ISSN:	0065-2393 ;