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Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis /

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Bibliographic Details
Other Authors: Cuomo, J. J., Rossnagel, Stephen M., Kaufman, Harold R.
Format: Book
Language:English
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, [1989]
Subjects:
Ion implantation.
Ion bombardment > Industrial applications.
Description
Physical Description:xviii, 438 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographies and index.
ISBN:081551199X :