Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis /

Bibliographic Details
Other Authors:	Cuomo, J. J., Rossnagel, Stephen M., Kaufman, Harold R.
Format:	Book
Language:	English
Published:	Park Ridge, N.J., U.S.A. : Noyes Publications, [1989]
Subjects:	Ion implantation. Ion bombardment > Industrial applications.

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