Semiconductor fabrication : technology and metrology /

Bibliographic Details
Corporate Authors:	Symposium on Semiconductor Processing, ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute
Other Authors:	Gupta, D. C. (Dinesh C.)
Format:	Conference Proceeding Book
Language:	English
Published:	Philadelphia, PA : ASTM, [1989]
Series:	ASTM special technical publication ; 990.
Subjects:	Semiconductors > Design and construction > Congresses.

Description
Item Description:	Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute.
Physical Description:	476 pages : illustrations
Bibliography:	Includes bibliographies and indexes.
ISBN:	0803112734