Semiconductor fabrication : technology and metrology /

Bibliographic Details
Corporate Authors:	Symposium on Semiconductor Processing, ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute
Other Authors:	Gupta, D. C. (Dinesh C.)
Format:	Conference Proceeding Book
Language:	English
Published:	Philadelphia, PA : ASTM, [1989]
Series:	ASTM special technical publication ; 990.
Subjects:	Semiconductors > Design and construction > Congresses.

Remote Storage