Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures :
| New Title: | Journal of vacuum science and technology. B, Nanotechnology & microelectronics |
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| Previous Title: | Journal of vacuum science & technology. B, Microelectronics processing and phenomena |
| Corporate Authors: | , |
| Format: | Journal |
| Language: | English |
| Published: |
New York :
Published for the Society by the American Institute of Physics,
[1991-2010]
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| Subjects: | |
| Online Availability: |
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| Published: | 2nd ser., v. 9, no. 1 (Jan./Feb. 1991)-2nd ser., v. 28, no. 1 (Jan./Feb. 2010). |
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| Item Description: | Title from cover. |
| Physical Description: | volumes : illustrations ; 29 cm |
| Publication Frequency: | Bimonthly |
| ISSN: | 1071-1023 1520-8567 0734-211X 2166-2746 |
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