Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures :

Bibliographic Details
Previous Title:	Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Corporate Author:	American Vacuum Society
Format:	Journal
Language:	English
Published:	New York : Published for the Society by the American Institute of Physics, [1991-]
Subjects:	Vacuum microelectronics > Periodicals. Microelectronics > Periodicals. Nanoparticles > Measurement > Periodicals. Vide (Technologie) > Périodiques. Microélectronique > Périodiques. Matériaux nanocristallins > Périodiques.
Online Availability:

Evans: Library Stacks

Holdings details from Evans: Library Stacks
Call Number	Status	Get It
Call Number:		TJ940 .J673
Notes:		Subscription converted to electronic resource
Indexes:		Index is bound in the back.
Library Owns: TJ940 .J673		(2nd ser:v.9:no.2-6 (1991:Mar./Apr.-Nov./Dec.); 2nd ser:v.10-16 (1992-1998); 2nd ser:v.17:no.1-2,4-6 (1999); 2nd ser:v.18-29 (2000-2011))
TJ940 .J673 2nd.ser.:v.10:no.1 1992:Jan./Feb.	Available
TJ940 .J673 2nd.ser.:v.10:no.2 1992:Mar./Apr.	Available
TJ940 .J673 2nd.ser.:v.10:no.3 1992:May/June	Available
TJ940 .J673 2nd. ser.:v.25:no.2 2007:Mar./Apr.	Available
TJ940 .J673 2nd ser.:v.22:no.3 2004:May/June	Available
TJ940 .J673 2nd ser.:v.22:no.4 2004:July/Aug.	Available
TJ940 .J673 2nd ser.:v.22:no.5 2004:Sept./Oct.	Available
TJ940 .J673 2nd ser.:v.22:no.6 2004:Nov./Dec.	Available
TJ940 .J673 2nd ser.:v.23:no.1 2005:Jan./Feb.	Available
TJ940 .J673 2nd ser.:v.23:no.2 2005:Mar./Apr.	Available
TJ940 .J673 2nd ser.:v.23:no.3 2005:May/June	Available
TJ940 .J673 2nd ser.:v.23:no.4 2005:July/Aug.	Available
TJ940 .J673 2nd ser.:v.24:no.4 2006:July/Aug.	Available
TJ940 .J673 2nd ser.:v.24:no.5 2006:Sept./Oct.	Available
TJ940 .J673 2nd ser.:v.24:no.6 2006:Nov./Dec.	Available
TJ940 .J673 2nd ser.:v.25:no.1 2007:Jan./Feb.	Available
TJ940 .J673 2nd ser.:v.25:no.3 2007:May/June	Available
TJ940 .J673 2nd ser.:v.25:no.4 2007:July/Aug.	Available
TJ940 .J673 2nd ser.:v.25:no.6 2007:Nov./Dec.	Available
TJ940 .J673 2nd ser.:v.26:no.1 2008:Jan./Feb.	Available
TJ940 .J673 2nd ser.:v.26:no.2 2008:Mar./Apr.	Available
TJ940 .J673 2nd ser.:v.26:no.3 2008:May/June	Available
TJ940 .J673 2nd ser.:v.26:no.4 2008:July/Aug.	Available
TJ940 .J673 2nd ser.:v.26:no.5 2008:Sept./Oct.	Available
TJ940 .J673 2nd ser.:v.27:no.1 2009:Jan./Feb.	Available
TJ940 .J673 2nd ser.:v.27:no.2 2009:Mar./Apr.	Available
TJ940 .J673 2nd ser.:v.27:no.3 2009:May/June	Available
TJ940 .J673 2nd ser.:v.27:no.4 2009:July/Aug.	Available
TJ940 .J673 2nd ser.:v.27:no.5 2009:Sept./Oct.	Available
TJ940 .J673 2nd ser.:v.27:no.6 2009:Nov./Dec.	Available
TJ940 .J673 2nd ser.:v.28:no.1 2010:Jan./Feb.	Available
TJ940 .J673 2nd ser.:v.28:no.2 2010:Mar./April	Available
TJ940 .J673 2nd ser.:v.28:no.3 2010:May/June	Available
TJ940 .J673 2nd ser.:v.28:no.4 2010:Juy/Aug.	Available
TJ940 .J673 2nd ser.:v.28:no.5 2010:Sept./Oct.	Available
TJ940 .J673 2nd ser.:v.28:no.6 2010:Nov./Dec.	Available
TJ940 .J673 2nd ser.:v.29:no.1 2011:Jan./Feb.	Available
TJ940 .J673 2nd ser.:v.29:no.2 2011:Mar./April	Available
TJ940 .J673 2nd ser.:v.29:no.3 2011:May/June	Available
TJ940 .J673 2nd ser.:v.29:no.4 2011:July/Aug.	Available
TJ940 .J673 2nd ser.:v.29:no.5 2011:Sept./Oct.	Available
TJ940 .J673 2nd ser.:v.29:no.6 2011:Nov./Dec.	Available
TJ940 .J673 2nd ser:v.24:no.3 2006:May/June	Available
TJ940 .J673 2nd ser:v.26:no.6 2008:Nov./Dec.	Available
TJ940 .J673 Ser.2:v.18:no.1 2000:Jan./Feb.	Available
TJ940 .J673 Ser.2:v.18:no.2 2000:Mar./Apr.	Available
TJ940 .J673 Ser.2:v.18:no.3 2000:May/June	Available
TJ940 .J673 Ser.2:v.18:no.4 2000:July/Aug.	Available
TJ940 .J673 Ser.2:v.18:no.5 2000:Sept./Oct.	Available
TJ940 .J673 Ser.2:v.18:no.6 2000:Nov./Dec.	Available
TJ940 .J673 Ser.2:v.19:no.1-2 2001:Jan./Feb.-Mar./Apr.	Available
TJ940 .J673 Ser.2:v.19:no.3 May/June	Available
TJ940 .J673 Ser.2:v.19:no.4 2001:July/Aug.	Available
TJ940 .J673 ser.2.:v.19:no.5 2001:Sept./Oct.	Available
TJ940 .J673 ser.2:v.16:no.3 1998:May/June	Available
TJ940 .J673 ser.2:v.16:no.4 1998:July/Aug.	Available
TJ940 .J673 ser.2:v.16:no.5 1998:Sept./Oct.	Available
TJ940 .J673 ser.2:v.16:no.6 1998:Nov./Dec.	Available
TJ940 .J673 ser.2:v.17:no.1 1999:Jan./Feb.	Available
TJ940 .J673 ser.2:v.17:no.2 1999:Mar./Apr.	Available
TJ940 .J673 ser.2:v.17:no.4 1999:July/Aug.	Available
TJ940 .J673 ser.2:v.17:no.5 1999:Sept./Oct.	Available
TJ940 .J673 ser.2:v.17:no.6 1999:nov./dec.	Available
TJ940 .J673 ser.2:v.20:no.1 2002:Jan./Feb.	Available
TJ940 .J673 ser.2:v.20:no.2 2002:Mar./Apr.	Available
TJ940 .J673 ser.2:v.20:no.3 2002:May/June	Available
TJ940 .J673 ser.2:v.20:no.4 2002:July/Aug.	Available
TJ940 .J673 ser.2:v.20:no.5 2002:Sept./Oct.	Available
TJ940 .J673 ser.2:v.20:no.6 2002:Nov./Dec.	Available
TJ940 .J673 ser.2:v.21:no.1 2003:Jan./Feb.	Available
TJ940 .J673 ser.2:v.21:no.2-3 2003:Mar./Apr.-May/June	Available
TJ940 .J673 ser.2:v.21:no.4 2003:July/Aug.	Available
TJ940 .J673 ser.2:v.21:no.5 2003:Sept./Oct.	Available
TJ940 .J673 ser.2:v.21:no.6 2003:Nov./Dec.	Available
TJ940 .J673 ser.2:v.22:no.1 2004:Jan./Feb.	Available
TJ940 .J673 ser.2:v.22:no.2 2004:Mar./Apr.	Available
TJ940 .J673 ser.2:v.23:no.5 2005:Sept./Oct.	Available
TJ940 .J673 ser.2:v.25:no.5 2007:Sept./Oct.	Available
TJ940 .J673 ser.2;v.19:no.6 2001:Nov./Dec.	Available
TJ940 .J673 ser:2:v.23:no.6 2005:Nov./Dec.	Available
TJ940 .J673 ser:2:v.24:no.1 2006: Jan./Feb.	Available
TJ940 .J673 ser:2:v.24:no.2 2006:March/ April	Available
TJ940 .J673 v.9:no.2 1991:Mar/Apr	Available
TJ940 .J673 v.9:no.3 1991:May/June	Available
TJ940 .J673 v.9:no.4 1991:July/Aug.	Available
TJ940 .J673 v.9:no.5 1991:Sept./Oct.	Available
TJ940 .J673 v.9:no.6 1991:Nov./Dec.	Available
TJ940 .J673 v.10:no.4 1992:July/Aug.	Available
TJ940 .J673 v.10:no.5 1992:Sept./Oct.	Available
TJ940 .J673 v.10:no.6 1992:Nov./Dec.	Available
TJ940 .J673 v.11:no.1 1993:Jan/Feb	Available
TJ940 .J673 v.11:no.2 1993:Mar/Apr	Available
TJ940 .J673 v.11:no.3 1993:MAY/June	Available
TJ940 .J673 v.11:no.4 1993:July/Aug	Available
TJ940 .J673 v.11:no.5 1993:Sept./Oct.	Available
TJ940 .J673 v.11:no.6 1993:Nov./Dec.	Available
TJ940 .J673 v.12:no.1 1994:Jan./Feb.	Available
TJ940 .J673 v.12:no.2 1994:Mar./Apr.	Available
TJ940 .J673 v.12:no.3 1994:May/June	Available
TJ940 .J673 v.12:no.4 1994:July/Aug.	Available
TJ940 .J673 v.12:no.5 1994:Sep./Oct.	Available
TJ940 .J673 v.12:no.6 1994:Nov./Dec.	Available
TJ940 .J673 v.13:no.1 -v.13:no.2 1995-1995	Available
TJ940 .J673 v.13:no.3 1995:May/June	Available
TJ940 .J673 v.13:no.4 1995:July/Aug.	Available
TJ940 .J673 v.13:no.5 1995:Sept./Oct.	Available
TJ940 .J673 v.13:no.6 1995:Nov./Dec.	Available
TJ940 .J673 v.14:no.1 1996:Jan./Feb.	Available
TJ940 .J673 v.14:no.2 1996:March/April	Available
TJ940 .J673 v.14:no.3 1996:May/June	Available
TJ940 .J673 v.14:no.4 1996:July/Aug.	Available
TJ940 .J673 v.14:no.5 1996:Sept/Oct	Available
TJ940 .J673 v.14:no.6 1996:Nov/Dec	Available
TJ940 .J673 v.15:no.1 1997:Jan./Feb.	Available
TJ940 .J673 v.15:no.2 -v.15:no.3 1997-1997	Available
TJ940 .J673 v.15:no.4 1997:July/Aug	Available
TJ940 .J673 v.15:no.5 1997:Sept/Oct	Available
TJ940 .J673 v.15:no.6 1997:Nov/Dec	Available
TJ940 .J673 v.16:no.1 1998:Jan/Feb	Available
TJ940 .J673 v.16:no.2 1998:Mar/April	Available