APA (7th ed.) Citation

International Conference on Materials and Process Characterization for VLSI, Zong, X., Wang, Y., & Chen, J. (1988). Materials and process characterization for VLSI, 1988 (ICMPC '88): Proceedings of the international conference : Oct. 24-29, 1988, Shanghai, China. World Scientific.

Chicago Style (17th ed.) Citation

International Conference on Materials and Process Characterization for VLSI, X.-F Zong, Y.-Y Wang, and J. Chen. Materials and Process Characterization for VLSI, 1988 (ICMPC '88): Proceedings of the International Conference : Oct. 24-29, 1988, Shanghai, China. Singapore ; Teaneck, N.J.: World Scientific, 1988.

MLA (9th ed.) Citation

International Conference on Materials and Process Characterization for VLSI, et al. Materials and Process Characterization for VLSI, 1988 (ICMPC '88): Proceedings of the International Conference : Oct. 24-29, 1988, Shanghai, China. World Scientific, 1988.