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The Journal of vacuum science and technology.

Bibliographic Details
New Title:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Corporate Authors:	American Institute of Physics, American Vacuum Society
Format:	Journal
Language:	English
Published:	[New York, N.Y.] : Published for the American Vacuum Society by the American Institute of Physics, [1964-1982]
Subjects:	Vacuum technology > Periodicals.
Online Availability:

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