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The Journal of vacuum science and technology.

Bibliographic Details
New Title:Journal of vacuum science & technology. A, Vacuum, surfaces, and films
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Corporate Authors: American Institute of Physics, American Vacuum Society
Format: Journal
Language:English
Published: [New York, N.Y.] : Published for the American Vacuum Society by the American Institute of Physics, [1964-1982]
Subjects:
Vacuum technology > Periodicals.
Online Availability: Check for online availability

Remote Storage

Holdings details from Remote Storage
Call Number: TJ940 .J67
Library Owns: TJ940 .J67 (v.1-21 (1964-1982))
Call Number Status Get It
TJ940 .J67 v.1-2 1964-1965 Available
TJ940 .J67 v.3 1966 Available
TJ940 .J67 v.4 1967 Available
TJ940 .J67 v.5 1968 Available
TJ940 .J67 v.6 1969 Available
TJ940 .J67 v.7 1970 Available
TJ940 .J67 v.8 1971 Available
TJ940 .J67 v.9 1972:May-1972:Dec. Available
TJ940 .J67 v.9:no.2 1972:Mar./Apr. Available
TJ940 .J67 v.10:no.1 -v.10:no.4 1973-1973 Available
TJ940 .J67 v.10:no.5 -v.10:no.6 1973-1973 Available
TJ940 .J67 v.11:no.1 1974:Jan.-Feb. Available
TJ940 .J67 v.11:no.5 -v.11:no.6 1974-1974 Available
TJ940 .J67 v.12:no.1 -v.12:no.3 1975-1975 Available
TJ940 .J67 v.13:no.1 -v.13:no.3 1976-1976 Available
TJ940 .J67 v.13:no.4 -v.13:no.6 1976-1976 Available
TJ940 .J67 v.14:no.1 -v.14:no.3 1977-1977 Available
TJ940 .J67 v.14:no.4-6 1977 Available
TJ940 .J67 v.15:no.1-v.15:no.3 1978-1978 Available
TJ940 .J67 v.15:no.4 -v.15:no.6 1978-1978 Available
TJ940 .J67 v.16:no.1 -v.16:no.3 1979-1979 Available
TJ940 .J67 v.16:no.4 -v.16:no.6 1979-1979 Available
TJ940 .J67 v.17:no.1 -v.17:no.3 1980-1980 Available
TJ940 .J67 v.17:no.4 -v.17:no.6 1980-1980 Available
TJ940 .J67 v.18:no.1 -v.18:no.2 1981-1981 Available
TJ940 .J67 v.18:no.3 1981:Apr. Available
TJ940 .J67 v.19:no.1 -v.19:no.3 1981-1981 Available
TJ940 .J67 v.20:no.1 -v.20:no.3 1982-1982 Available
TJ940 .J67 v.21:no.1 -v.21:no.2 1982-1982 Available
TJ940 .J67 v.21:no.3 -v.21:no.4 1982-1982 Available