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The Journal of vacuum science and technology.

Bibliographic Details
New Title:Journal of vacuum science & technology. A, Vacuum, surfaces, and films
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Corporate Authors: American Institute of Physics, American Vacuum Society
Format: Journal
Language:English
Published: [New York, N.Y.] : Published for the American Vacuum Society by the American Institute of Physics, [1964-1982]
Subjects:
Vacuum technology > Periodicals.
Online Availability: Check for online availability

Evans: Library Stacks

Holdings details from Evans: Library Stacks
Call Number: TJ940 .J67
Library Owns: TJ940 .J67 (v.1 (1964)-v.21 (1982))
Call Number Status Get It
TJ940 .J67 v.1:no.1 -v.2:no.6 1964-1965 Available
TJ940 .J67 v.7 1970 Available
TJ940 .J67 v.8 1971 Available
TJ940 .J67 v.9 1972:May-1972:Dec. Available
TJ940 .J67 v.9:no.2 1972:Mar./Apr. Available
TJ940 .J67 v.10:no.1 -v.10:no.4 1973-1973 Available
TJ940 .J67 v.10:no.5 -v.10:no.6 1973-1973 Available
TJ940 .J67 v.11:no.1 1974:Jan.-Feb. Available
TJ940 .J67 v.11:no.5 -v.11:no.6 1974-1974 Available
TJ940 .J67 v.12:no.1 -v.12:no.3 1975-1975 Available
TJ940 .J67 v.13:no.1 -v.13:no.3 1976-1976 Available
TJ940 .J67 v.13:no.4 -v.13:no.6 1976-1976 Available
TJ940 .J67 v.14:no.1 -v.14:no.3 1977-1977 Available
TJ940 .J67 v.14:no.4 1977(-v.14:no.6 (1977 Available
TJ940 .J67 v.15:no.1-v.15:no.3 1978-1978 Available
TJ940 .J67 v.15:no.4 -v.15:no.6 1978-1978 Available
TJ940 .J67 v.16:no.1 -v.16:no.3 1979-1979 Available
TJ940 .J67 v.16:no.4 -v.16:no.6 1979-1979 Available
TJ940 .J67 v.17:no.1 -v.17:no.3 1980-1980 Available
TJ940 .J67 v.17:no.4 -v.17:no.6 1980-1980 Available
TJ940 .J67 v.18:no.1 -v.18:no.2 1981-1981 Available
TJ940 .J67 v.18:no.3 1981:Apr. Available
TJ940 .J67 v.19:no.1 -v.19:no.3 1981-1981 Available
TJ940 .J67 v.20:no.1 -v.20:no.3 1982-1982 Available
TJ940 .J67 v.21:no.1 -v.21:no.2 1982-1982 Available
TJ940 .J67 v.21:no.3 -v.21:no.4 1982-1982 Available