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Ellipsometry for industrial applications /

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Bibliographic Details
Main Author: Riedling, Karl, 1948-
Format: Book
Language:English
Published: Wien ; New York : Springer-Verlag, [1988]
Subjects:
Thin films > Measurement.
Ellipsometry > Industrial applications.
Description
Item Description:Includes index.
Physical Description:xii, 99 pages : illustrations ; 25 cm.
Bibliography:Bibliography: pages [91]-95.
ISBN:038782040X (U.S. : pbk.)