Deposition and growth : limits for microelectronics, Anaheim, CA, 1987 /
| Corporate Authors: | , |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York :
American Institute of Physics,
1988.
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| Series: | American Vacuum Society series ;
4. AIP conference proceedings ; 167. |
| Subjects: |
| Item Description: | Topical conference held in Anaheim, California, on November 3-5, 1987, in conjunction with the American Vacuum Society's 34th National Symposium. "DOE CONF-8711124"--Title page verso. |
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| Physical Description: | 388 pages : illustrations ; 25 cm. |
| Bibliography: | Includes bibliographies and index. |
| ISBN: | 0883183676 |