Deposition and growth : limits for microelectronics, Anaheim, CA, 1987 /

Bibliographic Details
Corporate Authors:	American Institute of Physics, American Vacuum Society
Other Authors:	Rubloff, G. W.
Format:	Book
Language:	English
Published:	New York : American Institute of Physics, 1988.
Series:	American Vacuum Society series ; 4. AIP conference proceedings ; 167.
Subjects:	Microelectronics > Congresses. Thin films > Congresses.

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