Laser chemical processing for microelectronics /

Bibliographic Details
Other Authors:	Ibbs, K. G., Osgood, R. M.
Format:	Book
Language:	English
Published:	Cambridge [England] ; New York : Cambridge University Press, 1989.
Series:	Cambridge studies in modern optics ; 7.
Subjects:	Integrated circuits > Design and construction. Lasers > Industrial applications.

Description
Physical Description:	172 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographies and index.
ISBN:	0521322545