Laser chemical processing for microelectronics /

Bibliographic Details
Other Authors:	Ibbs, K. G., Osgood, R. M.
Format:	Book
Language:	English
Published:	Cambridge [England] ; New York : Cambridge University Press, 1989.
Series:	Cambridge studies in modern optics ; 7.
Subjects:	Integrated circuits > Design and construction. Lasers > Industrial applications.

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