Chemical vapor deposition for microelectronics : principles, technology, and applications /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
[1987]
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| Series: | Materials science and process technology series.
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| Subjects: |
| Physical Description: | xi, 215 pages : illustrations ; 25 cm. |
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| Bibliography: | Includes bibliographies and index. |
| ISBN: | 0815511361 : |