Chemical vapor deposition for microelectronics : principles, technology, and applications /

Bibliographic Details
Main Author:	Sherman, Arthur, 1931-
Format:	Book
Language:	English
Published:	Park Ridge, N.J., U.S.A. : Noyes Publications, [1987]
Series:	Materials science and process technology series.
Subjects:	Vapor-plating. Integrated circuits > Design and construction.

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