APA (7th ed.) Citation

Sherman, A. (1987). Chemical vapor deposition for microelectronics: Principles, technology, and applications. Noyes Publications.

Chicago Style (17th ed.) Citation

Sherman, Arthur. Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications. Park Ridge, N.J., U.S.A.: Noyes Publications, 1987.

MLA (9th ed.) Citation

Sherman, Arthur. Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications. Noyes Publications, 1987.