Cover Image

Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA /

Bibliographic Details
Corporate Author: Materials Research Society
Other Authors: Ehrlich, Daniel J., Higashi, Gregg S., Oprysko, Modest Michael, 1957-
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1988]
Series:Materials Research Society symposia proceedings.
Subjects:
Integrated circuits > Design and construction > Congresses.
Lasers > Industrial applications > Congresses.
Lasers in chemistry > Congresses.
Description
Physical Description:xv, 509 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographies and indexes.
ISBN:0931837693
ISSN:0272-9172 ;