Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA /

Bibliographic Details
Corporate Author:	Materials Research Society
Other Authors:	Ehrlich, Daniel J., Higashi, Gregg S., Oprysko, Modest Michael, 1957-
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1988]
Series:	Materials Research Society symposia proceedings.
Subjects:	Integrated circuits > Design and construction > Congresses. Lasers > Industrial applications > Congresses. Lasers in chemistry > Congresses.

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