Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Author:	Symposium on Polysilicon Films and Interfaces
Other Authors:	Wong, C. Y. (Catherine Y.), Thompson, C. V. (Carl V.), Tu, K. N. (King-Ning), 1937-
Format:	Conference Proceeding Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1988]
Series:	Materials Research Society symposia proceedings.
Subjects:	Silicon > Electric properties > Congresses. Integrated circuits > Materials > Congresses.

Description
Item Description:	"This volume represents the Proceedings of the Symposium on Polysilicon Films and Interfaces"--P. xi.
Physical Description:	xi, 369 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographies and indexes.
ISBN:	093183774X
ISSN:	0272-9172 ;