Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Author:	Symposium on Polysilicon Films and Interfaces
Other Authors:	Wong, C. Y. (Catherine Y.), Thompson, C. V. (Carl V.), Tu, K. N. (King-Ning), 1937-
Format:	Conference Proceeding Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1988]
Series:	Materials Research Society symposia proceedings.
Subjects:	Silicon > Electric properties > Congresses. Integrated circuits > Materials > Congresses.

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