Cover Image

Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Author: Materials Research Society
Other Authors: Donnelly, Vincent M., Herman, Irving P., Hirose, Masataka
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1987]
Series:Materials Research Society symposia proceedings. v. 75.
Subjects:
Materials > Effect of radiation on > Congresses.
Surface chemistry > Congresses.
Lasers > Industrial applications > Congresses.
Photon beams > Industrial applications > Congresses.
Plasma etching > Congresses.
Description
Physical Description:xix, 826 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographies and indexes.
ISBN:0931837413
ISSN:0272-9172 ;