Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Corporate Author:	Materials Research Society
Other Authors:	Donnelly, Vincent M., Herman, Irving P., Hirose, Masataka
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1987]
Series:	Materials Research Society symposia proceedings. v. 75.
Subjects:	Materials > Effect of radiation on > Congresses. Surface chemistry > Congresses. Lasers > Industrial applications > Congresses. Photon beams > Industrial applications > Congresses. Plasma etching > Congresses.

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