Cover Image

Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A. /

Bibliographic Details
Corporate Author: Materials Research Society
Other Authors: Wilson, Syd R., Powell, Ronald A., Davies, D. Eirug
Format: Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1987]
Series:Materials Research Society symposia proceedings ; v. 92.
Subjects:
Semiconductors > Heat treatment > Congresses.
Semiconductor doping > Congresses.
Description
Physical Description:xvii, 485 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographies and indexes.
ISBN:0931837596