Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A. /

Bibliographic Details
Corporate Author:	Materials Research Society
Other Authors:	Wilson, Syd R., Powell, Ronald A., Davies, D. Eirug
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1987]
Series:	Materials Research Society symposia proceedings ; v. 92.
Subjects:	Semiconductors > Heat treatment > Congresses. Semiconductor doping > Congresses.

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