Sputtering by particle bombardment /
| Other Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer-Verlag,
1981-
|
| Series: | Topics in applied physics ;
v. 47. Topics in applied physics ; v. 52. Topics in applied physics ; v. 64. |
| Subjects: |
| Physical Description: | volumes : illustrations ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 0387105212 (U.S.) |